Abstract. Conducting micro- and nanotubes and free-standing flexible helicat microcoils have been fabricated from strained Ge_xSi_1-x/Si heterolayers. The fabrication technique was based on self-rolling of a thin highly strained epitaxial Ge_xSi_1-x/Si bifilm detached from the substrate by selective etching of a sacrificial layer in a tube-shaped scroll. The obtained tube diameters varied from 10 nm to 13 m, depending on the thickness and lattice mismatch of the GeSi/Si bilayer. GeSi/Si tubes and helical coils, up to 70 nm in diameter, exhibit good conducting properties and high mechanical strength.